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Electrical characterization of wafer-bonded Ge(111)-on-insulator substrates using four-point-probe pseudo-metal-oxide-semiconductor field-effect transistor method
K. Minami, Y. Nakamura, S. Yamasaka, O. Yoshitake, J. Kikkawa, K. Izunome, A. SakaiVolume:
520
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.10.175
File:
PDF, 440 KB
english, 2012