Electrical and physical characteristics for crystalline...

Thin Solid Films 2012 Vol. 520; Iss. 7

Electrical and physical characteristics for crystalline atomic layer deposited beryllium oxide thin film on Si and GaAs substrates

J.H. Yum, T. Akyol, M. Lei, D.A. Ferrer, Todd.W. Hudnall, M. Downer, C.W. Bielawski, G. Bersuker, J.C. Lee, S.K. Banerjee
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Volume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.11.053
File:
PDF, 924 KB
english, 2012
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