Comparison of stress migration and electromigration in the fabrication of thin Al wires
Yebo Lu, Hironori Tohmyoh, Masumi SakaVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.12.054
File:
PDF, 771 KB
english, 2012