Sputtering deposition and characterization of zirconium...

Thin Solid Films 2012 Vol. 520; Iss. 9

Sputtering deposition and characterization of zirconium nitride and oxynitride films

A. Rizzo, M.A. Signore, L. Mirenghi, L. Tapfer, E. Piscopiello, E. Salernitano, R. Giorgi
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Volume:
520
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2012.01.005
File:
PDF, 1.35 MB
english, 2012
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