Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors
Arman Ahnood, Yuji Suzuki, Arun Madan, Arokia NathanVolume:
520
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2012.03.010
File:
PDF, 740 KB
english, 2012