Pulsed-radio frequency plasma enhanced chemical vapour...

Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors

Arman Ahnood, Yuji Suzuki, Arun Madan, Arokia Nathan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
520
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2012.03.010
File:
PDF, 740 KB
english, 2012
Conversion to is in progress
Conversion to is failed