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Evolution of structural and optical properties of nanostructured silicon carbon films deposited by plasma enhanced chemical vapour deposition
G. Ambrosone, D.K. Basa, U. Coscia, M. PassacantandoVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2012.03.027
File:
PDF, 905 KB
english, 2012