Evolution of structural and optical properties of...

Evolution of structural and optical properties of nanostructured silicon carbon films deposited by plasma enhanced chemical vapour deposition

G. Ambrosone, D.K. Basa, U. Coscia, M. Passacantando
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Volume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2012.03.027
File:
PDF, 905 KB
english, 2012
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