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Thermal properties of TiO2 films grown by atomic layer deposition
M.R. Saleem, P. Silfsten, S. Honkanen, J. TurunenVolume:
520
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2012.04.008
File:
PDF, 660 KB
english, 2012