Large-distance rf- and dc-sputtering of epitaxial...

Thin Solid Films 2012 Vol. 520; Iss. 17

Large-distance rf- and dc-sputtering of epitaxial La1 − xSrxMnO3 thin films

Philipp M. Leufke, Ajay Kumar Mishra, André Beck, Di Wang, Christian Kübel, Robert Kruk, Horst Hahn
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Volume:
520
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2012.04.064
File:
PDF, 1.20 MB
english, 2012
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