![](/img/cover-not-exists.png)
Time-dependent changes in morphology and resistance of W/TiN/Ti metal lines upon applying voltage pulses
Deok-kee Kim, Soo-Jung HwangVolume:
520
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2012.05.007
File:
PDF, 784 KB
english, 2012