Microstructure and hardness of SiC–TiC nanocomposite thin...

Thin Solid Films 2012 Vol. 520; Iss. 18

Microstructure and hardness of SiC–TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering

Gaku Osugi, Akihiko Ito, Mikinori Hotta, Takashi Goto
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Volume:
520
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2012.05.021
File:
PDF, 814 KB
english, 2012
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