Impact of oxygen and argon plasma exposure on the roughness...

Impact of oxygen and argon plasma exposure on the roughness of gold film surfaces

D. Berman, J. Krim
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Volume:
520
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2012.06.033
File:
PDF, 1014 KB
english, 2012
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