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Kinetic modeling of laser annealing processes in a-C:H films
Andrius Ibenskas, Arvaidas Galdikas, Alfonsas GrigonisVolume:
86
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2011.01.001
File:
PDF, 690 KB
english, 2011