Magnetron sputtered NbN films with electroplated Cr interlayer
Kulwant Singh, A.C. Bidaye, A.K. SuriVolume:
86
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2011.06.018
File:
PDF, 2.24 MB
english, 2011