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Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
Pavel Kulha, Oleg Babchenko, Alexander Kromka, Miroslav Husak, Ken HaenenVolume:
86
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2011.07.022
File:
PDF, 548 KB
english, 2012