Ion sputter etching of ZnO:Ga thin film surfaces
S. Flickyngerova, M. Netrvalova, I. Novotny, J. Bruncko, P. Gaspierik, P. Sutta, V. TvarozekVolume:
86
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2011.07.030
File:
PDF, 455 KB
english, 2012