Novel plasma treatment in linear antenna microwave PECVD...

Vacuum 2012 Vol. 86; Iss. 6

Novel plasma treatment in linear antenna microwave PECVD system

Neda Neykova, Halyna Kozak, Martin Ledinsky, Alexander Kromka
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Volume:
86
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2011.07.055
File:
PDF, 598 KB
english, 2012
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