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Sublimation epitaxy of 3C-SiC grown at Si- and C-rich conditions
M. Beshkova, J. Birch, M. Syväjärvi, R. YakimovaVolume:
86
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2012.03.020
File:
PDF, 556 KB
english, 2012