Preparation of silane modified SiO2 abrasive particles and...

Wear 2011 Vol. 273; Iss. 1

Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances

GuoShun Pan, ZhongHua Gu, Yan Zhou, Tuo Li, Hua Gong, Yan Liu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
273
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.wear.2011.05.044
File:
PDF, 593 KB
english, 2011
Conversion to is in progress
Conversion to is failed