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Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances
GuoShun Pan, ZhongHua Gu, Yan Zhou, Tuo Li, Hua Gong, Yan LiuVolume:
273
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.wear.2011.05.044
File:
PDF, 593 KB
english, 2011