Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering
A.K Costa, S.S Camargo Jr, C.A Achete, R CariusVolume:
377-378
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(00)01321-3
File:
PDF, 196 KB
english, 2000