Hydrogen-containing carbon nitride films produced by the...

Thin Solid Films 2000 Vol. 377-378; Iss. none

Hydrogen-containing carbon nitride films produced by the combined hot filament–plasma CVD technique

Jianjun Wang, Mário A.B de Moraes, Vı́tor Baranauskas, Steven F Durrant
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Volume:
377-378
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)01331-6
File:
PDF, 164 KB
english, 2000
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