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Nanocrystalline silicon thin films prepared by radiofrequency magnetron sputtering
C. Gonçalves, S. Charvet, A. Zeinert, M. Clin, K. ZellamaVolume:
403-404
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01553-x
File:
PDF, 150 KB
english, 2002