![](/img/cover-not-exists.png)
Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
Y. Cong, I. An, R.W. Collins, K. Vedam, H.S. Witham, L.J. Pilione, R. MessierVolume:
193-194
Year:
1990
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(05)80046-x
File:
PDF, 746 KB
english, 1990