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Sputtered tungsten for deep submicroncomplementary metal-oxide-semiconductor technology
L. Dori, A. Megdanis, S.B. Brodsky, M. Arienzo, S.A. CohenVolume:
193-194
Year:
1990
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(05)80060-4
File:
PDF, 454 KB
english, 1990