In-situ FTIR studies of the kinetics and self assembly of...

Thin Solid Films 1996 Vol. 284-285; Iss. none

In-situ FTIR studies of the kinetics and self assembly of alkyl and perfluoroalkyl trichlorosilanes on silicon

Reena Banga, Jack Yarwood, Anthony M. Morgan, Brian Evans, Jacqueline Kells
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Volume:
284-285
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(95)08319-7
File:
PDF, 599 KB
english, 1996
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