Multilayer reference coatings for depth profile standards

Thin Solid Films 1996 Vol. 290-291; Iss. none

Multilayer reference coatings for depth profile standards

U. Beck, G. Reiners, Th. Wirth, V. Hoffmann, F. Präßler
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Volume:
290-291
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)09083-9
File:
PDF, 365 KB
english, 1996
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