Transparent ZnO:Al films prepared by co-sputtering of...

Thin Solid Films 1996 Vol. 290-291; Iss. none

Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target

Kikuo Tominaga, Masahiro Kataoka, Haruhiko Manabe, Tetsuya Ueda, Ichiro Mori
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Volume:
290-291
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(96)09127-4
File:
PDF, 257 KB
english, 1996
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