Edge leakage of cobalt silicided shallow junctions

Thin Solid Films 1997 Vol. 308-309; Iss. none

Edge leakage of cobalt silicided shallow junctions

Chien-Hsiung Peng, Jer-shen Maa, Sheng Teng Hsu
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Volume:
308-309
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00484-7
File:
PDF, 316 KB
english, 1997
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