The effects of screen oxide and low temperature BPSG anneal...

Thin Solid Films 1997 Vol. 308-309; Iss. none

The effects of screen oxide and low temperature BPSG anneal on titanium salicide formation

Kye-Nam Lee, Jae-Gyung Ahn, Hyunsang Hwang, Jeong Soo Byun, Young-Jong Lee
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Volume:
308-309
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(97)00504-x
File:
PDF, 560 KB
english, 1997
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