PML/oxide/PML barrier layer performance differences arising from use of UV or electron beam polymerization of the PML layers
J.D Affinito, Stephan Eufinger, M.E Gross, G.L Graff, P.M MartinVolume:
308-309
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(97)00531-2
File:
PDF, 637 KB
english, 1997