Hard a-C:H films deposited at high deposition rates
F.C. Marques, R.G. Lacerda, M.M. de Lima Jr, J. VilcarromeroVolume:
343-344
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01630-7
File:
PDF, 316 KB
english, 1999