Characterization of interface of c-BN film deposited on...

Characterization of interface of c-BN film deposited on silicon(100) substrate

Jingze Tian, Lifang Xia, Xinxin ma, Yue Sun, Eung-sun Byon, Sung-hun Lee, Sang-ro Lee
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Volume:
355-356
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(99)00504-0
File:
PDF, 310 KB
english, 1999
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