Benzene flow rate effect on the properties of carbon films deposited on plasma nitrided steel using the MW/ECR PACVD process
Mohamed Zine Touhami, Abdelkader Khettache, Bouguerra Bouzabata, Hermmans Buchkremer, Horst WeissVolume:
27
Year:
2002
Language:
english
Pages:
13
DOI:
10.1016/s0151-9107(02)80017-4
File:
PDF, 1.01 MB
english, 2002