Etude par spectroscopie d'emission optique de decharges...

Etude par spectroscopie d'emission optique de decharges radiofrequence et micro-onde lors du depot chimique en phase vapeur (PACVD) dans le systeme Si-C-H-Ar

M. Andrieux, J.M. Badie, M. Ducarroir, L. Thomas
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Volume:
23
Year:
1998
Pages:
10
DOI:
10.1016/s0151-9107(99)80021-x
File:
PDF, 779 KB
1998
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