A comparison of thermally and photochemically cross-linked...

Microelectronic Engineering 2003 Vol. 67-68; Iss. none

A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

K. Pfeiffer, F. Reuther, M. Fink, G. Gruetzner, P. Carlberg, I. Maximov, L. Montelius, J. Seekamp, S. Zankovych, C.M. Sotomayor-Torres, H. Schulz, H.-C. Scheer
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Volume:
67-68
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(03)00079-0
File:
PDF, 410 KB
english, 2003
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