Roughness analysis of lithographically produced...

Microelectronic Engineering 2003 Vol. 67-68; Iss. none

Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis

George P. Patsis, Vasilios Constantoudis, Angeliki Tserepi, Evangelos Gogolides, Grozdan Grozev, Thomas Hoffmann
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
67-68
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(03)00085-6
File:
PDF, 266 KB
english, 2003
Conversion to is in progress
Conversion to is failed