Preparation of high aspect ratio surface microstructures...

Microelectronic Engineering 2003 Vol. 67-68; Iss. none

Preparation of high aspect ratio surface microstructures out of a Zr-based bulk metallic glass

A.A. Kündig, M. Cucinelli, P.J. Uggowitzer, A. Dommann
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Volume:
67-68
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00096-0
File:
PDF, 267 KB
english, 2003
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