Powder blasting patterning technology for microfabrication of complex suspended structures in glass
Anne-Gabrielle Pawlowski, Eric Belloy, Abdeljalil Sayah, Martin A.M. GijsVolume:
67-68
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(03)00114-x
File:
PDF, 718 KB
english, 2003