SNOM imaging of very fine pits formed by EB lithography for...

SNOM imaging of very fine pits formed by EB lithography for ultrahigh density optical recording

Sumio Hosaka, Hayato Sone, Yoshitaka Takahashi, Toshimichi Shintani, Keizo Kato, Toshiharu Saiki
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Volume:
67-68
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(03)00133-3
File:
PDF, 794 KB
english, 2003
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