Patterning of 25-nm-wide silicon webs with an aspect ratio...

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

St. Trellenkamp, J. Moers, A. van der Hart, P. Kordoš, H. Lüth
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Volume:
67-68
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00187-4
File:
PDF, 350 KB
english, 2003
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