Patterning of 25-nm-wide silicon webs with an aspect ratio of 13
St. Trellenkamp, J. Moers, A. van der Hart, P. Kordoš, H. LüthVolume:
67-68
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00187-4
File:
PDF, 350 KB
english, 2003