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Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates
Khaled Elgaid, David A. McCloy, Iain G. ThayneVolume:
67-68
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00188-6
File:
PDF, 200 KB
english, 2003