Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 169; Iss. 1-4
Structural and electrical characteristics of oxygen-implanted 6H-SiC
Lianwei Wang, Jipo Huang, Xinzhong Duo, Zhitang Song, Chenglu Lin, Carl-Mikael Zetterling, Mikael ÖstlingVolume:
169
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(00)00007-0
File:
PDF, 106 KB
english, 2000