Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 172; Iss. 1-4
Ion-source modeling and improved performance of the CAMS high-intensity Cs-sputter ion source
T.A. Brown, M.L. Roberts, J.R. SouthonVolume:
172
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(00)00202-0
File:
PDF, 1.24 MB
english, 2000