Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 170; Iss. 3-4
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Accurate location and marking of grain boundaries using focused ion and electron beams
F Machalett, K Edinger, J Melngailis, P Seidel, T VenkatesanVolume:
170
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0168-583x(00)00254-8
File:
PDF, 2.38 MB
english, 2000