Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 171; Iss. 4
![](/img/cover-not-exists.png)
Two-stage diffusion and nanoparticle formation in heavily implanted polycrystalline Al2O3
Sergei M. Duvanov, Adam G. BaloghVolume:
171
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(00)00320-7
File:
PDF, 258 KB
english, 2000