Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2001 Vol. 175-177; Iss. none
Fabrication of micromechanical structures on substrates selectively etched using a micropatterned ion-implantation method
Shizuka Nakano, Sachiko Nakagawa, Haruo Ishikawa, Hisato OgisoVolume:
175-177
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(00)00605-4
File:
PDF, 167 KB
english, 2001