Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2001 Vol. 181; Iss. 1-4
Micro-RBS study of nickel silicide formation
H.L. Seng, T. Osipowicz, P.S. Lee, D. Mangelinck, T.C. Sum, F. WattVolume:
181
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(01)00361-5
File:
PDF, 331 KB
english, 2001