Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2001 Vol. 181; Iss. 1-4
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Novel test sample for submicron ion-beam analysis
D. Spemann, T. Reinert, J. Vogt, T. Butz, K. Otte, K. ZimmerVolume:
181
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(01)00362-7
File:
PDF, 1.75 MB
english, 2001