Depth profiling of hydrogen in crystalline silicon using...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2001 Vol. 183; Iss. 3-4

Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis

R.D. Verda, C.J. Maggiore, J.R. Tesmer, A. Misra, T. Hoechbauer, M. Nastasi, R.W. Bower
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Volume:
183
Year:
2001
Language:
english
Pages:
12
DOI:
10.1016/s0168-583x(01)00635-8
File:
PDF, 256 KB
english, 2001
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