Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 186; Iss. 1-4
![](/img/cover-not-exists.png)
Interactions of primary defects with impurities in silicon
B.N. Mukashev, Kh.A. Abdullin, Yu.V. GorelkinskiiVolume:
186
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(01)00883-7
File:
PDF, 111 KB
english, 2002