Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 186; Iss. 1-4
Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si
H Schut, A van Veen, S.W.H Eijt, R Job, A.G Ulyasin, W.R FahrnerVolume:
186
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(01)00902-8
File:
PDF, 135 KB
english, 2002